| Micro-electro
Mechanical Systems |
Definition
Micro-electromechanical systems (MEMS) is a technology that combines computers
with tiny mechanical devices such as sensors, valves, gears, mirrors, and actuators
embedded in semiconductor chips.
Overview
MEMS are already used as accelerometers in automobile air-bags. They've replaced
a less reliable device at lower cost and show promise of being able to inflate
a bag not only on the basis of sensed deceleration but also on the basis of the
size of the person they are protecting. Basically, a MEMS device contains micro-circuitry
on a tiny silicon chip into which some mechanical device such as a mirror or a
sensor has been manufactured. Potentially, such chips can be built in large quantities
at low cost, making them cost-effective for many uses. Introduction
Among
the presently available uses of MEMS or those under study are: Global
position system sensors that can be included with courier parcels for constant
tracking and that can also sense parcel treatment en route .
Sensors built
into the fabric of an airplane wing so that it can sense and react to air flow
by changing the wing surface resistance; effectively creating a myriad of tiny
wing flaps .
Optical switching devices that can switch light signals over
different paths at 20-nanosecond switching speeds
Sensor-driven heating and
cooling systems that dramatically improve energy savings .
Building supports
with imbedded sensors that can alter the flexibility properties of a material
based on atmospheric stress sensing .
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