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INTRODUCTION Microelectromechanical
systems (MEMS) represent a growing technology with critical applications across
diverse fields. Much of the industrial effort is directed toward replacing conventional
technology with MEMS devices to reduce cost, increase functionality, improve reliability,
and decrease size and mass
Micro-electro-mechanical systems or MEMS are micron-scale (human hair < 100
microns) devices and tools that can be fabricated in ways similar to integrated
circuits and are used in industrial, automotive, defense, life sciences, and consumer
applications.
Other examples of real-world MEMS devices are RF components for cell phones, miniature
pressure sensors for blood pressure monitoring, DNA detectors on a chip, micro-mirror
arrays for portable projectors, as well as inertial sensors for realistic computer
gaming joysticks and wireless computer interfaces, etc.
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements,
sensors, actuators, and electronics on a common silicon substrate through micro
fabrication technology. While the electronics are fabricated using integrated
circuit (IC) process sequences and the micromechanical components are fabricated
using compatible "micromachining" processes that selectively etch away
parts of the silicon wafer or add new structural layers to form the mechanical
and electromechanical devices.
MEMS
(Micro Electro Mechanical Systems) are the integration of electrical devices and
mechanical structures at the micrometer (10-6 m = 0.000001 m) scale. The essence
of MEMS is their ability to perform and enhance tasks, in ways and in the micro
world, impossible using conventional technologies. MEMS devices find applications
in the automotive, medical, aerospace, defense and telecommunications industries.
Although, electrical devices and very few mechanical devices at this scale are
common, the scaling down of common mechanical devices found in the macro world
has created a research area all its own. The behavior of mechanical structures
at the micro scale has yet to reach full understanding. Although, MEMS are created
using many of the fully understood processing techniques used in IC (Integrated
Circuit) processing with little variation, there are still many material, fabrication
and packaging issues that have yet to be resolved. Micro-Electro-Mechanical Systems
(MEMS) is the integration of mechanical elements, sensors, actuators, and electronics
on a common silicon substrate through micro fabrication technology. While the
electronics are fabricated using integrated circuit (IC) process sequences (e.g.,
CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated
using compatible "micromachining" processes that selectively etch away
parts of the silicon wafer or add new structural layers to form the mechanical
and electromechanical devices.
The semiconductor industry already has much of the infrastructure to batch process
MEMS devices, however, the expertise to mass produce a wide variety of MEMS devices
is still in its infancy, stimulated by research funded by both corporations and
government agencies. NASA has a very special interest in MEMS technology. MEMS
offer the benefits of significantly reduced mass and power consumption translating
directly into direct cost benefits as a result of this. The main obstacle in rapidly
integrating new technologies into space systems is determining system reliability.
Reliability, the ability of a device/system to maintain performance requirements
throughout its lifetime, is a major consideration factor for making device selections
for space flight applications. Space missions can be expected to last upwards
of 5 years with spacecraft subject to extreme mechanical shock, vibration, temperature,
vacuum, and radiation environments.
MEMS promises to revolutionize nearly every product category by bringing together
silicon-based microelectronics with micromachining technology, making possible
the realization of complete systems-on-a-chip. MEMS is an enabling technology
allowing the development of smart products, augmenting the computational ability
of microelectronics with the perception and control capabilities of microsensors
and microactuators and expanding the space of possible designs and applications
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